Characteristics

• The Alpha-Step D-500 stylus profiler is capable of measuring 2D step heights from a few nanometers up to 1200µm. The D-500 also supports 2D measurements of roughness, bow and stress for R&D and production environments. The D-500 includes a manual 140mm stage and advanced optics with enhanced video controls;
• Profiler 2D acquisition and surface analysis software – 30 mm scan length;
• Optical lever sensor head – Vertical range: 0 - 1200 μm; Force range: 0.03 - 15 mg; Computer stylus force control;
• Side view optics – 3760 x 3120 μm FoV; 5 MP color digital camera; 4x digital zoom; Keystone correction for angled optics;
• Manual sample stage – 140 mm diameter chuck; XY stage movement: 20 x 80 mm;
• Manual stage leveling;
• 1 micron step height standard with KLA-Tencor certification;
• 50 micron step height standard with KLA-Tencor certification;
• Computer;